http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2015129342-A1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-044 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F3-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30625 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate | 2015-01-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2017-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-WO2015129342-A1 |
| titleOfInvention | Polishing composition |
| abstract | The present invention is a polishing composition for use in polishing a polishing object having a layer containing a cobalt element, comprising a cobalt dissolution inhibitor and a pH adjuster, and having a pH of 4 or more and 12 or less. The cobalt dissolution inhibitor is at least one selected from the group consisting of an organic compound having an ether bond, an organic compound having a hydroxy group, an organic compound having a carboxyl group and a molecular weight of 130 or more, and salts thereof. The present invention relates to a polishing composition that is a seed. ADVANTAGE OF THE INVENTION According to this invention, when grind | polishing the grinding | polishing target object which has a layer containing a cobalt element, the polishing composition which can suppress melt | dissolution of the layer containing a cobalt element is provided. [Selection figure] None |
| priorityDate | 2014-02-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 448.