http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-S6327834-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5128cfc84a0fb189fceb3cd240c44493 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-037 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-037 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G73-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G73-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| filingDate | 1986-07-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3ee8bf0a8fbf6f0b6f5dc6509ae3d308 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_366e87b4b0344c0a35aff99fef32b832 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d49d64ead44bf7024e8ddc95c7193f7a |
| publicationDate | 1988-02-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-S6327834-A |
| titleOfInvention | Heat resistant photoresist film |
| abstract | PURPOSE:To obtain the titled film capable of omitting a spin-coating process by incorporating a polymer having a specific repeating unit, and a photopolymerization initiator as an essential component to the titled film, thereby making a photosensitive film to a dry film with a resist having heat-resisting property. CONSTITUTION:The titled film contains the polymer having the repeating unit shown by formula I and the photopolymerization initiator as the essential component. In formula I, X is a (2+n) valence carbon ring or heterocyclic ring, Z is imido ring, quinazolinedione or oxazinedione ring, R is a group having carbon- carbon double bond, W is a group capable of forming a ring by reacting with carbonyl group of -COOR at the time of cleaving ROH by heat-treating, (n) is 1 or 2, (m) is 0, 1 or 2, and COOR group and Z group have the inter-relationship between an ortho and a peri positions. Thus, the spin-coating process can be omitted, and all processes can be carried out by a continous-operation whereby the through-put of the titled film is improved, and the manufacturing process makes possible to automatize. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H06342211-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H0836264-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H05289334-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H0850354-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7141614-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012514760-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5280329-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20160127098-A |
| priorityDate | 1986-07-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 33.