| abstract |
(57) [Problem] To provide a novel calixarene derivative and a calixresorcinarene derivative having an acid-dissociable functional group, and a photosensitive composition. SOLUTION: The calixarene derivative and the calixresorcinarene derivative represented by the following formula (1): And a photosensitive composition containing the derivative and a photoacid generator. The derivative and the photosensitive composition are useful as a positive type chemically amplified resist material and the like. Embedded image (Wherein R 1 and R 2 are each independently a hydrogen atom or an alkyl group having 1 to 5 carbon atoms, R 3 is a hydrogen atom, te a group selected from an rt-butoxycarbonyl group, a trimethylsilyl group and a cyclohexenyl group, at least one of which is a group other than a hydrogen atom, n is an integer of 1 to 3, and m is an integer of 4 to 12. ) |