http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H11188614-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8fb9f44db08d1c42a53f3d28eaae416f |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00 |
| filingDate | 1997-12-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_809cb2161f2ee814aabe8037f7087da4 |
| publicationDate | 1999-07-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H11188614-A |
| titleOfInvention | Polishing method of workpiece |
| abstract | (57) [Summary] [PROBLEMS] To perform a multi-stage polishing process using the same polishing machine. An object of the present invention is to provide a method for polishing a workpiece, which can be performed at a high speed and a low surface roughness, and in particular, a method for polishing a workpiece suitable for polishing a brittle material such as a glass material, a carbon substrate, and a ceramic material. SOLUTION: The method of the present invention for polishing a workpiece while supplying a polishing liquid containing polishing abrasive grains, a polishing aid, and water comprises a polishing aid (A) capable of improving a polishing rate as the polishing aid. The first polishing step is performed while supplying the first polishing liquid containing -1), and then, after the supply of the first polishing liquid is stopped, in the same polishing apparatus as the first polishing step, As the polishing aid, a polishing aid (A-A) capable of lowering the surface roughness of a workpiece and dispersing abrasive grains and polishing debris in a polishing liquid. It is characterized in that the second polishing step is performed while supplying the second polishing liquid containing 2). |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007251141-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010205336-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009050920-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008296318-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011204327-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010513693-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008231159-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020196370-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016035040-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006524583-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102343547-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2001057352-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-0148114-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007191696-A |
| priorityDate | 1997-12-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 132.