http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016035040-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a665d61597c2731ab4130971ee397dc9 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00 |
| filingDate | 2015-02-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_11147c4bacf2b61803909e1762156a7e |
| publicationDate | 2016-03-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2016035040-A |
| titleOfInvention | Polishing composition |
| abstract | Provided is a polishing composition capable of suppressing surface roughness of a nickel-containing material and capable of polishing the nickel-containing material at a high speed. A nickel-containing material polishing composition comprising abrasive grains and an organic compound, wherein the organic compound has an oxo acid group containing a phosphorus atom and a hydrophobic group. The nickel-containing material polishing composition, wherein the oxo acid group containing a phosphorus atom is a phosphine group, a phosphonic acid group or a phosphoric acid group, and the hydrophobic group is a substituted / unsubstituted C6-20 aryl group or an alkyl group . Furthermore, the nickel containing polishing composition containing 0.001-2.0 mol / L of oxidizing agents. [Effect] Since the etching rate of the nickel-containing material is suppressed, the surface roughness is suppressed, and the nickel-containing material is polished at a high polishing rate. [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7319157-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2017200211-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101827366-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109153888-A |
| priorityDate | 2014-08-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 424.