| abstract |
(57) Abstract: [PROBLEMS] To provide a compound that can be used as an acid generator of a resist composition containing an alkali-soluble resin having a protective group that can be cleaved by the action of an acid, and using the compound, a resist excellent in various performances. A composition is provided. A glyoxime ester represented by the formula (I). In the formula, Q 1 and Q 2 independently represent hydrogen, alkyl, cycloalkyl, aryl or heteroaryl, or Q 1 and Q 2 are bonded to each other to form a ring. Esters of formula (I) are the corresponding glyoxime-based NO It can be produced by reacting the H-form with 10-camphorsulfonyl halide. The resist composition is obtained by using the ester of the formula (I) as an acid generator and blending it with an alkali-soluble resin having a protecting group capable of being cleaved by the action of an acid. |