| abstract |
(57) [Summary] [Construction] In a sputtering method in which a negative voltage is applied intermittently at a constant cycle, the voltage is controlled to 0 V for at least a part of the time when the negative voltage is not applied. A sputtering method, which has a time of 24 and is equal to or longer than the time required from the occurrence of one arc discharge to its disappearance. [Effect] The occurrence of arcing can be prevented, and the discharge can be stably maintained for a longer period of time than in ordinary DC sputtering. |