http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2021106262-A1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02266 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-0652 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-0036 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-3485 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-0057 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0217 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-54 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-318 |
| filingDate | 2020-07-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2021-12-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-WO2021106262-A1 |
| titleOfInvention | Film formation method |
| abstract | When forming a dielectric film by target sputtering, the number of particles adhering to the surface of the substrate to be processed immediately after film formation is as large as possible without impairing the function of effectively suppressing the induction of abnormal discharge. Provided is a film forming method capable of reducing the number. In the film forming method of the present invention in which the target 2 is sputtered in the vacuum chamber 1 to form a dielectric film on the surface of the substrate Sw to be processed, a negative potential is applied in a pulse shape to the target during sputtering of the target. Then, the frequency when the negative potential is applied in a pulse shape is set in the range of 100 kHz or more and 150 kHz or less, and the application time Ton of the negative potential is set in the range longer than 5 μsec and shorter than 8 μsec. |
| priorityDate | 2019-11-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 29.