http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H07261393-A

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http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-031
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filingDate 1994-03-25-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b43c31ae817426e53a0612de5912f591
publicationDate 1995-10-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-H07261393-A
titleOfInvention Negative resist composition
abstract (57) [Summary] [Structure] A photosensitive composition comprising a substance that generates a basic substance upon exposure to light for pattern formation in a chemically amplified resist pattern formation process and a substance that generates an acid in a post-exposure heating process. And a negative resist composition used in the step of forming a resist pattern in lithography. According to the present invention, it is possible to form a fine resist pattern having a good shape and a high resolution.
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Total number of triples: 63.