patent/JP-H07261392-A

http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H07261392-A

Outgoing Links

Predicate	Object
assignee	http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e5db580deca7130dbe51805c6c608b35
classificationIPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
filingDate	1994-03-17-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor	http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_de3c138207acd3bcab8f2bd0b33f75a7 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_02602d7bf4a6b83c0a7c1feabedae8f0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_815834bcf610c5c7bac1881d56b26961 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7eb9187837867c9c08b7a2db9ce85446 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ad60b78d1616f3cba147e2333490c4a0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_99bdff9aa47d25894f4e6e415f25ea71
publicationDate	1995-10-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber	JP-H07261392-A
titleOfInvention	Chemically amplified resist and resist pattern forming method using the same
abstract	(57) [Abstract] [Purpose] To improve the pattern accuracy of a chemically amplified resist that forms a negative resist with high resolution even when used as a negative resist. [Structure] A chemically amplified resist base resin having a hydrophobic atomic group that is cleaved by an acid in the side chain of the base resin, a photo-acid generator, a cross-linking agent and a solvent.
isCitedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010237695-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9046782-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8088557-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8637222-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100520183-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20160027156-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010217884-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011065105-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013117739-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4617337-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9164384-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10444627-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7001710-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8017298-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2015045876-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2011102546-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015068860-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8999621-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6803176-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7998655-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20110126627-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4558064-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8951718-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8071272-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010190106-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008310314-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100989567-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2486452-A4 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2486452-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2012102644-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7985534-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100421034-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010256858-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2010087516-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2010095763-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011191753-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015057667-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20140103187-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008309878-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4590431-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9465298-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008309879-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014322650-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010244062-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2008153109-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011141495-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4554665-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013054377-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9291904-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8642253-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8852847-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8034547-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4551970-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008292975-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8546063-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7851140-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2019044469-A1
priorityDate	1994-03-17-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type	http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate

Subject

http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11729320
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3283
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID70300
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559261
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5461123
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID996
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456367111
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559541
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415746057
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419509562
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458393640
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID448674543
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419474448
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID62453

Total number of triples: 88.