http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H06148896-A

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_89afae566b725ae78e20cf972d9bcdc7
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
filingDate 1992-11-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_23c43aa3fe55d690d955960d87a560cc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7f08ea87295ed56b59dae70df070c234
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7781c815ad86ec41feb2a543fffc8f68
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_757f8711d3b59c4a88a269e18468cfe7
publicationDate 1994-05-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-H06148896-A
titleOfInvention Resist coating liquid and resist material using the same
abstract (57) [Summary] [Structure] A resist coating solution containing a water-soluble film-forming component and a fluorine-based surfactant, and a resist material having an anti-interference film formed on the surface thereof. [Effect] Since the interference effect in the lithography technique is reduced, it is possible to form a resist pattern with excellent pattern dimension accuracy as a result.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7709182-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7365115-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-0201299-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6811817-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100770551-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-100461005-C
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H1069091-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H08305024-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H1184640-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H09291228-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2004001510-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5514526-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6416930-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6472127-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5814694-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2002184673-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H06273926-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1818723-A4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1818723-A1
priorityDate 1992-11-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID448969875
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID370
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID523077
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414883164
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419564793
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415747868
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID413951797
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414863755
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID129711983
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID4986139
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559562
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID13622
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11421
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID962
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419547110
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419520057
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID413951792
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419548882
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10687
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9833985
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID70837
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6380
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426060809
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421324251
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426053603
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9554
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419474382
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID121950
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421348734
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID406907632
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14471
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID79130
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5164908
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID2776282
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415767689
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410438845
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419549475
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID138202
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID454299037
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419512635
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410904264
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8571
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID86747312
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9015
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID17587
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7041
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7564
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419526573
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14917
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID74483
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID17111
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID53627474
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID447515206
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID468172510
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414881362
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419541999
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID66603349
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID17888
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID454668499
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID1057
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419531062
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421152469

Total number of triples: 96.