http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7163221-B2

Outgoing Links

Predicate Object
classificationCPCAdditional http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2006
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L2203-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L2312-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-168
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-162
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B41-27
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B43-27
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-094
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D133-068
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F112-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0332
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0273
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31058
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0271
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F120-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-301
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F120-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31144
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31116
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-038
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L33-10
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F20-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G59-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L33-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L63-00
filingDate 2019-03-11-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2022-10-31-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 2022-10-31-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-7163221-B2
titleOfInvention Polymer material, composition and method for manufacturing semiconductor device
priorityDate 2019-03-11-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2001083696-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017032658-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010536054-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010225899-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016185999-A
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414862845
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458397365
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID424384725
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7026
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID407219005
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415782091
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID424383405
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID32524
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415755949
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID428
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419520720
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419482485
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID61242
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419964171
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID424354469
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419518532
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419520718
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID25188
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID448674543
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414881866
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9231
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID408101383
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID75821
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID114576
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415729698
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID83301
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421182920
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8197
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID86876
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9115
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421348734
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410255917
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID1317
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID273
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24250
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420017144
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419568798
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID93719
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID18814
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID17857
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID70004
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421071116
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7947
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID413960775
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID407611241
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419583152
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21910289
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450418934
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419540653
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420129835
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID479307
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID68315
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID69534
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410534369
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID69533
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458394586
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID18374
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415793428
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6547
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21226428
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7579
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421915846
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID407235762
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458394802
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419513606
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415993373
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414883053
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11448
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24273
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID449779615
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415816504
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID37715
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11729320
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID166693
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID16682925
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414859283
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419515750
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414860598
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID425737550
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID75121
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID19990
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457160489
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419483985
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID20548
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID13907058
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421035466
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8671
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24817
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8054
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID15522
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9171
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID75110
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419474459
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID4625581
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419547026
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419526711
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID85689
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456028012
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID75617
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID138202
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419546203
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415755888
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21884879
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID152743267
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420961491
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID263
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456711995
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID17236
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419549759
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID524491
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426041563
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415860939
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID31423
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419530529
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419530516

Total number of triples: 156.