http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-5047728-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0035 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate | 2007-08-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2012-10-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2012-10-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-5047728-B2 |
| titleOfInvention | Method for forming fine pattern of semiconductor element |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008072101-A |
| priorityDate | 2006-09-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 88.