| abstract |
PROBLEM TO BE SOLVED: To provide a siloxane polymer which gives a radiation-sensitive composition having excellent resolution. SOLUTION: At least a compound represented by the following formula (5-1), formula (5-2), or formula (5-3) or (4- (1-ethoxyethoxy) phenyl) trimethoxysilane and methoxymethyl are used. A siloxane polymer composed of a copolymer with a compound having a compound. (In the formula, R 17 , R 19 and R 21 indicate an ethyl group, R 22 and R 23 indicate a methyl group, and R 16 , R 18 and R 20 indicate a methoxy group.) [Selection diagram] None |