| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-06 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30625
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02024
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-04 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 |
| filingDate |
2018-05-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2020-09-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2020527612-A |
| titleOfInvention |
Oxidizing fluid for chemical mechanical polishing of ceramic materials |
| abstract |
The present disclosure relates to fluid compositions that can be used in the chemical mechanical polishing process of inorganic materials. The fluid composition can contain at least one oxidizing agent and a multivalent cation component. The use of fluid compositions during the chemical mechanical polishing process can promote a relatively defect-free material surface after polishing while achieving adequate material removal rates. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2022168860-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2022168858-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2022168859-A1 |
| priorityDate |
2017-05-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |