http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019052265-A
Outgoing Links
Predicate | Object |
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assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b19eaa8e535da4e4bceed99917a68153 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09J201-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09J133-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09J7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B27-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
filingDate | 2017-09-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c98b6b6b3544d2c21664cea8d1fcabc4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7473d4e5d8a47c98d5b4535b8e2802b6 |
publicationDate | 2019-04-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-2019052265-A |
titleOfInvention | Temporary fixing tape |
abstract | Provided is a temporary fixing tape capable of carrying out grinding and polishing of a substrate while suppressing or preventing generation of dimples on the substrate. A support base and an adhesive layer are provided, and the substrate is temporarily fixed to the support base via the adhesive layer in order to process the substrate, and energy rays are applied to the adhesive layer after the substrate is processed. Is a temporary fixing tape 200 that is used to release the substrate from the support base material 82, and the support base material 82 includes a first layer 821 that supports the substrate and the first layer 821. When the substrate 71, which is located between the layer 821 and the adhesive layer 81 and has the second layer 822 having cushioning properties and has the protrusions 26 on at least one surface, is joined to the adhesive layer 81, The tip of the protrusion 26 is located in the adhesive layer 81. [Selection] Figure 5 |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7135451-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019210324-A |
priorityDate | 2017-09-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 155.