http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019210324-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b19eaa8e535da4e4bceed99917a68153 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09J7-38 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09J7-29 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09J7-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09J201-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B27-00 |
| filingDate | 2018-05-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c0764ed582fdfd7a17127784e5ee8e6f |
| publicationDate | 2019-12-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2019210324-A |
| titleOfInvention | Temporary fixing tape |
| abstract | A temporary fixing tape capable of carrying out grinding and polishing of a substrate in a state in which generation of dimples in the substrate is suppressed or prevented. A temporary fixing tape 200 of the present invention includes a support base 82 and an adhesive layer 81, and temporarily fixes the substrate to the support base 82 via the adhesive layer 81 in order to process the substrate. It is used to detach the substrate from the support base material 82 by irradiating the adhesive layer 81 with energy rays after processing the substrate. The support base material 82 includes a first layer 821 that supports the substrate and the first layer 821. A second layer 822 having a cushioning property, which is located between the layer 821 and the adhesive layer 81, and the second layer 822 has an elastic modulus at 45 ° C. of 1 MPa to 50 MPa, and When the elastic modulus at 25 ° C. of the second layer 822 is M1 [MPa] and the elastic modulus at 45 ° C. of the second layer 822 is M2 [MPa], M1-M2 is 2 MPa or more and 100 MPa or less. . [Selection] Figure 5 |
| priorityDate | 2018-05-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 158.