| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_250d7d24d096f307230e703f0ddc2275 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2221-68327 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6836 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09J201-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09J7-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09J133-00 |
| filingDate |
2001-02-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4624527d8c3326c893377b03d9eb0ad7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aae7a3e9a705773c6d2e89ecf2bf67a4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eff3e69a1976e7b3c73f1463ac66a605
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c1bead01514731f4da14ebd2e61ccafe
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1ef5d89f73a0be74690b001f6a9a7028
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9fb9f1e010da8726066776ea20958b1d |
| publicationDate |
2002-08-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2002241713-A |
| titleOfInvention |
Semiconductor wafer protection sheet |
| abstract |
(57) Abstract: When a semiconductor wafer fixing sheet is attached to a semiconductor wafer having a surface with irregularities of about 100 μm, a gap is formed between a circuit and the semiconductor wafer fixing sheet, or the semiconductor wafer is polished. May be chipped or cracked. SOLUTION: A cushion layer is provided between a sheet-like support and an adhesive layer laminated on one surface of the support, and the cushion layer has a dynamic elastic modulus at 10 to 40 ° C. of 1 × 1. 0 -2 to 5 × 10 3 N / cm 2 and a thickness of 10 to 30 0 μm and the thickness of the pressure-sensitive adhesive layer is 5 to 150 μm. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2004331743-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101382596-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7119320-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019099620-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006083222-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019052265-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009105312-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4676732-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014037539-A |
| priorityDate |
2001-02-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |