http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018526668-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3086 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0332 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0273 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-003 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3081 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0002 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-027 |
| filingDate | 2015-09-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2018-09-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2018526668-A |
| titleOfInvention | Metal composition and process for producing the same |
| abstract | The present disclosure relates to a method of forming a purified metal-containing unit by reducing impurities with acidified purified water. Another example is a composition comprising a purified metal-containing unit. Yet another specific example is that a composition comprising a purified metal-containing unit is deposited on a substrate, a film comprising the purified metal-containing unit is dried, and the film comprising the purified metal-containing unit is actinic radiation. A method of forming a patterned substrate by exposing to a source and transferring the pattern to the substrate. The disclosed embodiments are useful for the manufacture of patterned substrates by direct or indirect pattern transfer from films comprising purified metal-containing units. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020533418-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7140686-B2 |
| priorityDate | 2015-09-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 355.