| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_98a75c9fff239084cf3c988c59841957 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-7684
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-044
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31051 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00 |
| filingDate |
2017-06-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_92f37af11ddd1b311929fb613153059b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e0fae38ba53042471e3e59fd01dcc0c2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a219b4e1153b7f01bd717cd3c4660355
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cbc4e85e963216bd77e51338e2842080 |
| publicationDate |
2018-02-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2018019075-A |
| titleOfInvention |
Additive for barrier chemical mechanical planarization |
| abstract |
A polishing composition having a high polishing rate using a low concentration of abrasive particles is provided. A barrier chemical mechanical planarization polishing composition comprising a suitable chemical additive is provided. Suitable chemical additives are silicate compounds and high molecular weight polymers / copolymers. A chemical mechanical polishing method using the barrier chemical mechanical planarization polishing composition is also provided. [Selection figure] None |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2021530097-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020059847-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11505718-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7240346-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-6882727-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2021065815-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7048550-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7209004-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020074353-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020141137-A |
| priorityDate |
2016-07-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |