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filingDate 2014-12-08-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 2017-02-09-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2017504950-A
titleOfInvention Solar cell emitter region fabrication using ion implantation.
abstract A method of manufacturing a solar cell emitter region using ion implantation and the resulting solar cell are described. In one example, a method for manufacturing alternating N-type and P-type emitter regions of a solar cell includes forming a silicon layer on a substrate. A dopant impurity atom of the first conductivity type is implanted into the silicon layer through the first shadow mask to form a first implanted region, resulting in a non-implanted region of the silicon layer. A dopant impurity atom of the second opposite conductivity type is implanted into a part of the non-implanted region of the silicon layer through the second shadow mask to form a second implanted region, and the residual non-implanted silicon layer A region arises. The remaining non-implanted region of the silicon layer is removed by a selective etching process while the first and second implanted regions of the silicon layer are annealed to form a doped polycrystalline silicon emitter region.
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