http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2003077908-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9df90d7822cc480ce12c480f4089e229 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-522 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G77-60 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08J5-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 |
| filingDate | 2001-09-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_adbf6a62f9ef1f55f99e050054c750ce http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3f3a24883ad1c93f0f74f4e7eb2c369d |
| publicationDate | 2003-03-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2003077908-A |
| titleOfInvention | Interlayer insulating film containing aromatic polycarbosilane and semiconductor device using the same |
| abstract | PROBLEM TO BE SOLVED: To provide an insulating material having a low dielectric constant, excellent heat resistance, thermal conductivity and mechanical strength, a low coefficient of thermal expansion, and capable of suppressing diffusion of a metal as a wiring material into an insulating film. Provided are an interlayer insulating film formed of a material and a semiconductor device constituted by the same. SOLUTION: The following general formula (1) (Wherein R 1 and R 2 represents a divalent aromatic group which may have a substituent. n is an integer of 2 to 50,000. ) Is an interlayer insulating film formed using a polymer containing an aromatic polycarbosilane represented by the formula (1). Since this interlayer insulating film has a low dielectric constant, it is useful for high integration and high speed when used for a semiconductor device. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7028853-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007238658-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100763828-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4621894-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020092269-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017504950-A |
| priorityDate | 2001-09-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 51.