| Predicate |
Object |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30625
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31053
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D7-65
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1454
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D5-027 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D7-65
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate |
2014-07-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2016-09-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2016529356-A |
| titleOfInvention |
CMP composition comprising abrasive particles containing ceria |
| abstract |
A chemical mechanical polishing (CMP) composition comprising abrasive particles containing ceria is described. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019099590-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2018124230-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7045171-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020117709-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018206956-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7077236-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2018124230-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-6990261-B2 |
| priorityDate |
2013-07-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |