http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016035567-A
Outgoing Links
Predicate | Object |
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assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-38 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F20-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 |
filingDate | 2015-07-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eb1839c842dea679d210afc09fbad701 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a144f3526dc1d67cb5c2c69f8714bf36 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b5fdf765c2378e2dd139c2825ad992c3 |
publicationDate | 2016-03-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-2016035567-A |
titleOfInvention | Resist composition |
abstract | The present invention provides a resist composition capable of forming a resist pattern having a good pattern shape and excellent fringe edge roughness. A resist composition comprising a structural unit having a -SO2- group, a structural unit represented by formula (II), a resin (A1) containing a structural unit having an acid labile group, and an acid generator. . [In formula (II), R2 represents a C1-C6 alkyl group optionally having a halogen atom, a hydrogen atom or a halogen atom, and X1 is a single bond, -CO-O- * or -CO -NR4- * is represented, * represents a bond to -Ar, R4 represents a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, and Ar is selected from the group consisting of a hydroxy group and a carboxyl group. The C6-C20 aromatic hydrocarbon group which may have the above group is represented. ] [Selection figure] None |
priorityDate | 2014-07-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 248.