http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015158011-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_de498babb0c04a00ceb653738877b147 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F11-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-40 |
| filingDate | 2015-02-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a76109a49b48ec774eb92d1836dc35b4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c844e65423b4856a5376c387c548400b |
| publicationDate | 2015-09-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2015158011-A |
| titleOfInvention | Molybdenum amide compounds |
| abstract | An object of the present invention is to provide a raw material for formation capable of producing a high-quality molybdenum oxide-containing thin film that is excellent in transportability of a precursor in the CVD method, can be easily and stably supplied to a substrate, and can be stably supplied. SOLUTION: A reactive intermediate obtained by reacting sodium molybdate and t-amylamine in 1,2-dimethoxyethane in the presence of triethylamine and trimethylchlorosilane is reacted with ethylmethylamine in the presence of normal butyllithium. Molybdenum compound represented by the following formula. [Selection figure] None |
| priorityDate | 2015-02-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 220.