| abstract |
A radiation-sensitive resin composition having excellent LWR performance is provided. A polymer having a structural unit containing an acid-dissociable group, and an acid generator, the acid generator containing SO3-, and a hydrogen atom or an electron at the α-position carbon atom of SO3- A radiation-sensitive resin composition comprising a compound having a sulfonate anion in which a donor group is bonded and one electron-attracting group is bonded to a β-position carbon atom and a radiation-decomposable onium cation. The compound preferably has a group represented by the following formula (1-1) or (1-2). In the following formulas (1-1) and (1-2), R1 and R2 are each independently a hydrogen atom or a monovalent electron donating group. R3 is a monovalent electron withdrawing group. R4 is a hydrogen atom or a monovalent hydrocarbon group. [Selection figure] None |