http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014192245-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67069 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32449 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32136 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate | 2013-03-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1e1d5039e04b2da3fbe514f149d01d19 |
| publicationDate | 2014-10-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2014192245-A |
| titleOfInvention | Plasma processing method and plasma processing apparatus |
| abstract | In a plasma processing method, lateral etching of a tungsten layer is suppressed. A first etching step of supplying a processing gas containing a fluorine-containing gas to a processing container 12 and generating plasma to etch a tungsten layer W from the upper surface of the tungsten layer W to before reaching the lower surface of the tungsten layer. S2 and a processing gas containing an oxygen-containing gas are supplied to the processing container 12, and plasma is generated to process the tungsten layer W. A processing gas containing a fluorine-containing gas is supplied to the processing container 12. And a second etching step S4 for generating plasma and etching the tungsten layer W up to the lower surface of the tungsten layer W. [Selection] Figure 2 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102332767-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20190105129-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2022328307-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020505780-A |
| priorityDate | 2013-03-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 33.