Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D305-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F20-38 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D303-16 |
filingDate |
2013-11-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_316dc9ef3e33bc1aace42938b037bf4a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a144f3526dc1d67cb5c2c69f8714bf36 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6f9496034d4403d25d488eaf2f4029c4 |
publicationDate |
2014-07-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
JP-2014131980-A |
titleOfInvention |
Salt, resin, resist composition and method for producing resist pattern |
abstract |
The present invention provides a salt for a resin used in a composition capable of obtaining an excellent resist pattern. A salt represented by formula (I). [R 3 is formula (IA) or formula (IE); Y 1 is formula (Iy)] [Selection figure] None |
priorityDate |
2012-12-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |