| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 |
| filingDate |
2013-02-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b2be8c1d8302d6fb84663820906c7f02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5274201dd3cdbfb3b87410e86dbb2323
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_36616a7dfdb0a7e59c6f4b808e61f918 |
| publicationDate |
2013-09-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2013190782-A |
| titleOfInvention |
Resist composition and method for producing resist pattern |
| abstract |
A resist composition capable of obtaining a resist pattern with excellent resolution is provided. A resin comprising a resin and an acid generator, wherein the resin has a group represented by the formula (I) and an acid labile group, and the solubility in an alkaline aqueous solution is increased by the action of the acid. And the acid generator is an acid generator containing a salt composed of an organic cation and an organic anion having an acid labile group. [In Formula (I), R 1 and R 2 each independently represent a fluorine atom or a C 1-6 perfluoroalkyl group. Z1 + represents an organic cation. ] [Selection figure] None |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016334702-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2015194330-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10599033-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102408296-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7353124-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9880466-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101847429-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20180001476-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2015194330-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I721982-B |
| priorityDate |
2012-02-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |