| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D333-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D307-00 |
| filingDate |
2010-11-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a144f3526dc1d67cb5c2c69f8714bf36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5274201dd3cdbfb3b87410e86dbb2323 |
| publicationDate |
2011-06-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2011126869-A |
| titleOfInvention |
Salt and resist composition for acid generator |
| abstract |
The present invention provides a salt for an acid generator of a resist composition capable of forming a pattern having excellent resolution. A salt represented by formula (I). [Q 1 and Q 2 represent a fluorine atom or a C 1-6 perfluoroalkyl group. L 1 represents a C 1-17 alkylene group, and —CH 2 — contained in the alkylene group may be replaced by —O— or —CO—. L 2 represents a single bond or —O— (CH 2 ) 1 —CO—, and —CH 2 — contained in — (CH 2 ) 1 — may be replaced by —O—. l represents an integer of 1 to 6. Ring W 1 represents a C 4-36 lactone ring. R 3 represents a C 1-6 alkyl group or a C 1-6 alkoxy group. t represents an integer of 0-2. R 1 represents a C 1-12 hydrocarbon group. Ring W 2 represents a C 3-36 saturated hydrocarbon ring. R 2 represents a C 1-6 alkyl group or a C 1-6 alkoxy group. s represents the integer of 0-2. Z + represents an organic counter ion. ] [Selection figure] None |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7183757-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018203712-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9599897-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7197988-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/BE-1028751-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019112395-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2018110430-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2018110429-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7353144-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11340527-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018165264-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20190135933-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11693314-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013190782-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7210894-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7172975-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/BE-1027107-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/BE-1025923-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/BE-1026363-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020111564-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/BE-1028011-A1 |
| priorityDate |
2009-11-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |