| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_89afae566b725ae78e20cf972d9bcdc7 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F20-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate |
2011-12-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9b62b3cde18cd54c9075f068a81aa275
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fa096bba069e48b6f161e1af3f70bce9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_877ef9023d3e6ea84b12450f9727c344
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3efad7eeb16ab8a41c11bc6acf4283e2 |
| publicationDate |
2013-06-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2013125070-A |
| titleOfInvention |
Resist composition and resist pattern forming method |
| abstract |
The present invention provides a resist composition having excellent lithography characteristics and adhesion, and reduced scum, and a resist pattern forming method. A substrate component (A) whose solubility in a developing solution is changed by the action of an acid, an acid generator component (B) which generates an acid upon exposure, one or more primary or secondary alcoholic hydroxyl groups Or one or more compounds selected from a polyacrylate polymer compound (C) having an organic group having a chain-like tertiary alcoholic hydroxyl group and compounds represented by formulas (d1) to (d3) A resist composition comprising a photoreactive quencher (D). [Selection figure] None |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016231651-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9977328-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016148741-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015054833-A |
| priorityDate |
2011-12-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |