| abstract |
Disclosed are: [A] a polymer containing a structural unit (I) represented by formula (1) below and a structural unit (II) represented by formula (2) below; and [B] a radiation-sensitive resin composition containing a radiation-sensitive acid-generating agent. In formula (1), R 1 is a hydrogen atom or a methyl group. R 2 is a carbon atom. R 3 is a straight-chain or branched alkyl group with 1-4 carbon atoms. Z and R 2 form a divalent radical derived from a cycloalkane with less than 10 carbon atoms. However, the total number of carbon atoms in the group comprising Z, R 2 and R 3 , must be no less than 8. In addition, if the number of carbon atoms in the radical comprising Z and R 2 is 5 or 6, R 3 is a linear or branched alkyl group with 2-4 carbon atoms. In formula (2), R 4 is a hydrogen atom or a methyl group. R 5 is a carbon atom. R 6 is a linear or branched alkyl group with 2-4 carbon atoms. X and R 4 form a divalent bridged alicyclic hydrocarbon group with at least 10 carbon atoms. |