http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012219164-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F8-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate | 2011-04-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_36616a7dfdb0a7e59c6f4b808e61f918 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b2be8c1d8302d6fb84663820906c7f02 |
| publicationDate | 2012-11-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2012219164-A |
| titleOfInvention | Resin production method |
| abstract | The present invention provides a method for producing a resin for a resist composition capable of obtaining excellent line width roughness. A method for producing a resin having a structural unit represented by formula (I) and formula (II), wherein a monomer represented by formula (III) and a monomer represented by formula (IV) are polymerized A process for producing a resin, comprising: a first step of causing the product obtained in the first step to hydrolyze to form —O—CO—R 7 as —OH. [R 1 and R 5 represent an alkyl group, a hydrogen atom, or a halogen atom. R 2 to R 4 represent an alkyl group or an alicyclic hydrocarbon group, or R 2 and R 3 are bonded to form a divalent hydrocarbon group. X 1 and X 2 represent a single bond or a divalent linking group. R 7 and R 8 represent an alkyl group or combine to form a divalent hydrocarbon group. ] [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2018079203-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7203133-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2021095575-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2018079203-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I733916-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109803990-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20190050809-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102208103-B1 |
| priorityDate | 2011-04-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 253.