Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_268be9afa00cf55b5aa72b1612151ecb |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-283 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-36 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F212-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F212-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F8-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F224-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-302 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-20 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F224-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F8-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F212-14 |
filingDate |
2017-10-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fc5ec654fdab69aba5e5ee430a267bb4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1037a749a7d25144305b690cd1dbda52 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ea0ac96f61e2222852f331ec0ed094e4 |
publicationDate |
2019-05-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
CN-109803990-A |
titleOfInvention |
Method for producing resin and method for producing photosensitive radiation-sensitive or radiation-sensitive composition |
abstract |
The present invention provides a method for producing a resin capable of forming a resist film having excellent resolution and reducing scum at the time of patterning, and a method for producing a photosensitive radiation-sensitive or radiation-sensitive composition. The method for producing the resin produces a resin comprising a repeating unit represented by the general formula (1) and a repeating unit including a group that is decomposed by the action of an acid to generate a polar group, and the method includes the steps of: first In a first step, a resin precursor containing a repeating unit represented by the general formula (2) and a repeating unit containing a group that is decomposed by the action of an acid to generate a polar group is obtained; and in the second step, an acid or a base is used to The group represented by -OY in the repeating unit represented by the general formula (2) in the resin precursor is deprotected to obtain the repeating unit represented by the general formula (1). |
priorityDate |
2016-10-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |