abstract |
A method for producing a resin for a resist composition having excellent linewidth roughness is provided. A method for producing a resin having a structural unit represented by formula (I) and formula (II), comprising: a monomer represented by formula (III); and a monomer represented by formula (IV). a first step of polymerizing the product obtained in the first step is hydrolyzed, method for producing a resin having a second step, the of the -O-CO-R 7 to -OH. [R 1 and R 5 represent an alkyl group which may have a halogen atom, a hydrogen atom or a halogen atom. R 2 to R 4 represent an alkyl group or an alicyclic hydrocarbon group, or R 2 and R 3 are bonded to each other to form a divalent hydrocarbon group. X 1 and X 2 represent a single bond or a divalent linking group. ] [Selection figure] None |