http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012208476-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F20-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-033 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 |
| filingDate | 2012-02-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a144f3526dc1d67cb5c2c69f8714bf36 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5756d88bd4de1b02e40fcc310564b566 |
| publicationDate | 2012-10-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2012208476-A |
| titleOfInvention | Resist composition and method for producing resist pattern |
| abstract | The present invention provides a resist composition capable of obtaining a resist pattern having an excellent mask error factor and few defects. A resin having a structural unit represented by formula (I), (A2) a resin that is insoluble or hardly soluble in an alkaline aqueous solution and can be dissolved in an alkaline aqueous solution by the action of an acid, an acid generator, The resist composition containing the compound and solvent represented by this. [Wherein, R 1 is a hydrogen atom or a methyl group; A 1 is — (CH 2 ) m1 —, — (CH 2 ) m2 —O— (CH 2 ) m3 — or — (CH 2 ) m4 —CO— O— (CH 2 ) m5 —; m1 to m5 are each independently an integer of 1 to 6; R 2 is a hydrocarbon group having a fluorine atom; and ring W 1 represents a saturated heterocyclic ring. ] [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013257552-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014115638-A |
| priorityDate | 2011-03-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 278.