Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F20-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 |
filingDate |
2012-02-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9cc1db49bfd3b30adf323473ea1a4126 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a144f3526dc1d67cb5c2c69f8714bf36 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_153d9ab45d90d19234e4e5282fb77563 |
publicationDate |
2012-10-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
JP-2012190002-A |
titleOfInvention |
Resist composition and method for producing resist pattern |
abstract |
An object of the present invention is to provide a resist composition capable of obtaining a resist pattern having excellent CD uniformity and few defects. (A1) A resin having a structural unit represented by formula (I), (A2) a resin that is insoluble or hardly soluble in an aqueous alkali solution and becomes soluble in an aqueous alkali solution by the action of an acid, and (B) A resist composition containing an acid generator having a structure that is cleaved by the action of an alkali developer. [In Formula (I), R 1 represents a hydrogen atom or a methyl group. A 1 represents an alkanediyl group having 1 to 6 carbon atoms. R 2 represents a C 1-10 hydrocarbon group having a fluorine atom. ] [Selection figure] None |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019089782-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018012689-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018012688-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014115619-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019026637-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013041269-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015007048-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7056421-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012194209-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012226325-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017090898-A |
priorityDate |
2011-02-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |