| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0046
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C309-70
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07D333-46 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C309-17
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D335-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D333-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| filingDate |
2011-07-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0106502b1821cd02a499d92f680621ab
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a144f3526dc1d67cb5c2c69f8714bf36 |
| publicationDate |
2012-06-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2012106980-A |
| titleOfInvention |
Salt, resist composition and method for producing resist pattern |
| abstract |
An object of the present invention is to provide a salt having a good focus margin (DOF) and mask error factor (MEF) of the obtained pattern and a resist composition containing the salt. A salt represented by formula (I) and a resist composition containing the salt. [Wherein, R 1 and R 2 are each a hydroxy group or an alkyl group, and a methylene group in the alkyl group may be replaced by an oxy group, etc .; R 3 is an alkyl group; P is an integer of 0 to 3; p is an integer of 1 to 3; a methylene group of a heterocyclic ring containing a sulfonium cation may be replaced by an oxy group or a carbonyl group; R 4 and R 5 are each a fluorine atom or a perfluoroalkyl group; L 1 is a divalent saturated hydrocarbon group, the methylene group in the group may be replaced by an oxy group or a carbonyl group; Y is an aliphatic hydrocarbon group or a saturated cyclic hydrocarbon group, etc. The methylene group may be replaced with an oxy group or the like. ] [Selection figure] None |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11448962-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11550218-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012193170-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015143208-A |
| priorityDate |
2010-07-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |