| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_268be9afa00cf55b5aa72b1612151ecb |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F22-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F20-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F22-36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F12-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 |
| filingDate |
2009-09-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0e6cffdfc0c3aa0ae0462ebadda86bdf
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9b2cbaa9fef0bd8ec66e14cb425cfb01
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_001acd2b0a91f42454c036017469437c |
| publicationDate |
2011-03-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2011053624-A |
| titleOfInvention |
Actinic ray-sensitive or radiation-sensitive resin composition and pattern forming method using the same |
| abstract |
PROBLEM TO BE SOLVED: To provide an actinic ray-sensitive or radiation-sensitive resin composition excellent in sensitivity, resolution, roughness characteristics and stability over time and capable of forming a pattern having a good shape, and a pattern forming method using the same. An actinic ray-sensitive or radiation-sensitive resin composition according to the present invention includes a resin having a structure represented by the following general formula (I) and a compound that generates an acid upon irradiation with an actinic ray or radiation. Including. [Chemical 1] [Selection figure] None |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014106299-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014071304-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012136692-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9285679-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012106980-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9513547-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011070147-A |
| priorityDate |
2009-09-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |