| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_33dafb5bbc2ec47ebcb7becbbe60f704 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C2603-74 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0273
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F20-36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C271-34 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C271-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F20-36 |
| filingDate |
2010-09-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f00c61a70acfc5e60c565ba7046a1e3b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b48927ef26a1eb8c0120f7bf3fa22efe |
| publicationDate |
2012-03-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2012062371-A |
| titleOfInvention |
Carbamoyloxyadamantane derivative, polymer compound and photoresist composition |
| abstract |
The present invention provides a novel acrylate derivative that can be a structural unit of a polymer compound contained in a photoresist composition, and a polymer compound obtained by polymerizing a raw material containing the acrylate derivative. And providing a photoresist composition containing the polymer compound and having a high resolution resist pattern with improved LWR as compared with the prior art. A carbamoyloxyadamantane derivative represented by the following general formula, a polymer compound obtained by polymerizing a raw material containing the carbamoyloxyadamantane derivative, a photoresist containing the polymer compound, a photoacid generator and a solvent Composition. (In the formula, R represents a hydrogen atom, a methyl group or a trifluoromethyl group.) [Selection figure] None |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012137735-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20170013818-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10437147-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016045472-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110036344-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10012903-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9720324-B2 |
| priorityDate |
2010-09-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |