| abstract |
A polymer excellent in roughness reduction, solubility, compatibility, defect reduction, exposure sensitivity, etc., when used as a positive photoresist, a monomer (monomer) providing the same, and a precursor thereof (intermediate, Modifier). A homoadamantane derivative represented by the following formula (I): In the formula, R 1 and R 2 each represent a hydrogen atom or a linear, branched or cyclic hydrocarbon group having 1 to 6 carbon atoms, X represents a hydroxyl group or a halogen atom, and n and m each represents 0 to It is an integer of 3. However, n and m are not 0 at the same time. [Selection figure] None |