http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013257537-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F216-36 |
| filingDate | 2013-04-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_04d3730b6ad527289e0c18d5b14850d2 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0578340d8eda8655050b54e7ae628333 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a144f3526dc1d67cb5c2c69f8714bf36 |
| publicationDate | 2013-12-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2013257537-A |
| titleOfInvention | Resist composition and method for producing resist pattern |
| abstract | A resist composition capable of producing a resist pattern with an excellent focus margin is provided. A resin comprising a structural unit represented by formula (I) and a structural unit having an acid labile group, and a resist composition comprising an acid generator represented by formula (II). [Wherein, R 1 represents an alkyl group which may have a halogen atom, a halogen atom or the like; A 1 represents a single bond, * -A 2 —O—, * -A 2 —CO—O— or the like; 2 is an alkanediyl group; R II1 and R II2 are each a fluorine atom or a perfluoroalkyl group; L II1 is a single bond, an alkanediyl group, a divalent alicyclic hydrocarbon group, etc .; Y II1 is a substituent It represents an alicyclic hydrocarbon group which may have. ] [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7296808-B2 |
| priorityDate | 2012-05-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 309.