| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F20-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F12-24 |
| filingDate |
2010-07-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_36616a7dfdb0a7e59c6f4b808e61f918
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b2be8c1d8302d6fb84663820906c7f02 |
| publicationDate |
2011-08-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2011150282-A |
| titleOfInvention |
Resist composition |
| abstract |
A resist composition capable of obtaining a pattern having excellent resolution is provided. A resin having an acid labile group and insoluble or hardly soluble in an aqueous alkali solution and soluble in an aqueous alkali solution by the action of an acid; A resist composition containing an acid generator and a compound represented by the formula (I ′). [In formula (I ′), R ′ 1 , R ′ 2 , R ′ 3 and R ′ 4 each independently represent a C 1 to C 8 alkyl group. A ′ 1 is a divalent C 3 to C 36 saturated cyclic hydrocarbon group which may have a substituent or a divalent C 6 to C 20 aromatic hydrocarbon group which may have a substituent. The saturated cyclic hydrocarbon group and the aromatic hydrocarbon group may contain a hetero atom. ] [Selection figure] None |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9448477-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014240942-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2014042288-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017107186-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013200561-A |
| priorityDate |
2009-09-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |