http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011008293-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_268be9afa00cf55b5aa72b1612151ecb |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-28 |
| filingDate | 2010-09-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_435d9c9b194a593797b0d757710778ec |
| publicationDate | 2011-01-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2011008293-A |
| titleOfInvention | Positive photosensitive composition and pattern forming method using the positive photosensitive composition |
| abstract | A positive photosensitive composition used in a semiconductor manufacturing process such as an IC, a circuit board such as a liquid crystal and a thermal head, and other photofabrication processes, and the positive photosensitive composition are used. In the pattern forming method, a positive photosensitive composition having improved pattern shape, PEB temperature dependency and exposure latitude, and a pattern forming method using the positive photosensitive composition are provided. Bicyclo [2. As a compound having a specific structure that generates an organic acid upon irradiation with actinic rays or radiation, and (B) an acid-decomposable group that decomposes by the action of an acid to generate an alkali-soluble group. 2.1] A positive type characterized by containing a group in which a group having an ester bond is bonded to a heptane skeleton, and a resin having a specific repeating unit and whose solubility in an alkaline developer is increased by the action of an acid. A photosensitive composition and a pattern forming method using the positive photosensitive composition. [Selection figure] None |
| priorityDate | 2010-09-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 217.