http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005068418-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fcc0b66123940d1b32783569ebfa2d45 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-033 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 |
| filingDate | 2004-08-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8485b35a7c1a21ef9becb14e20570676 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8a1fe9ead439503816b839fc3b440b1a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7efa6d268b898cbcab1319b710fcb851 |
| publicationDate | 2005-03-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2005068418-A |
| titleOfInvention | Acrylic polymer and radiation-sensitive resin composition |
| abstract | PROBLEM TO BE SOLVED: To improve the solubility in a resist solvent, to be less dependent on the baking temperature, and to reduce the line edge roughness of a pattern after development. SOLUTION: Formula (1), Formula (2), Formula (3) and / or Formula (4) are contained. [Chemical 1] R, R ′, R ″, and R ′ ″ are a hydrogen atom, a methyl group, or a trifluoromethyl group, and R 1 is a hydrogen atom, a linear or branched alkyl group having 1 to 4 carbon atoms. , An alkoxy group, or a linear or branched fluorinated alkyl group having 1 to 4 carbon atoms, wherein X is a polycyclic alicyclic hydrocarbon group consisting of only a carbon atom having 7 to 20 carbon atoms and a hydrogen atom R 2 and R 3 are each independently a linear or branched alkyl group having 1 to 4 carbon atoms, R 4 is an alicyclic hydrocarbon group having 4 to 20 carbon atoms, and R 5 is carbon. A linear or branched alkyl group having 1 to 4 carbon atoms, R 6 and R 7 each represent a hydrogen atom or a linear or branched alkyl group having 1 to 4 carbon atoms. [Selection] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9052594-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101563375-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010536977-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011008293-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007272194-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012108527-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008111103-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009191237-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8084188-B2 |
| priorityDate | 2003-08-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 345.