http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009191108-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fcc0b66123940d1b32783569ebfa2d45 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-522 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08J9-26 |
| filingDate | 2008-02-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6447aed45f7552890d0a3062894cceaa http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_92fc605b2e3b56d292a0e3edd1c387a1 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7a55a1ac76182d9688da99180d06355f |
| publicationDate | 2009-08-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2009191108-A |
| titleOfInvention | Silicon-containing film forming composition, silicon-containing film forming method, and silicon-containing film |
| abstract | [PROBLEMS] To form a film that can be suitably used in a semiconductor element or the like for which high integration and multilayering are desired, has excellent mechanical strength, has a low relative dielectric constant, low moisture absorption, and high processing resistance. A silicon-containing film-forming composition that can be used, a method for forming a silicon-containing film using the composition, and a silicon-containing film obtained by the forming method are provided. A silicon-containing film forming composition includes an organosilane compound represented by the following general formula (1) and a pore forming agent. [Chemical 1] (1) (Wherein R 1 to R 4 are the same or different and each represents a hydrogen atom, an alkyl group having 1 to 4 carbon atoms, a vinyl group, or a phenyl group, and R 5 represents an alkyl group having 1 to 4 carbon atoms or an acetyl group. Or n represents an integer of 1 to 3, and m represents an integer of 1 to 2.) [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8932674-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019507956-A |
| priorityDate | 2008-02-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 72.