http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009194037-A
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fcc0b66123940d1b32783569ebfa2d45 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316 |
filingDate | 2008-02-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6447aed45f7552890d0a3062894cceaa http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7a55a1ac76182d9688da99180d06355f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_92fc605b2e3b56d292a0e3edd1c387a1 |
publicationDate | 2009-08-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-2009194037-A |
titleOfInvention | Silicon-containing film and method for forming the same |
abstract | A silicon-containing film which can be suitably used in a semiconductor element or the like for which high integration and multilayering are desired, has excellent mechanical strength, has a low relative dielectric constant, low moisture absorption, and high processing resistance. A method of forming the same is provided. A method for forming a silicon-containing film includes a step of forming a deposited film by chemical vapor deposition using an organosilane compound represented by the following general formula (1) and a pore-forming agent: Curing the deposited film. [Chemical 1] (1) (Wherein R 1 to R 4 are the same or different and each represents a hydrogen atom, an alkyl group having 1 to 4 carbon atoms, a vinyl group, or a phenyl group, and R 5 represents an alkyl group having 1 to 4 carbon atoms or an acetyl group. Or n represents an integer of 1 to 3, and m represents an integer of 1 to 2.) [Selection figure] None |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8932674-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009191108-A |
priorityDate | 2008-02-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 67.