abstract |
A laminated body with reduced leakage current and a method for manufacturing the same are provided. A laminate includes a base material, a silica-based insulating portion provided above the base material, a conductive portion provided in the silica-based insulating portion, and the silica-based insulating portion and the conductive portion. A barrier layer provided on the barrier layer, the barrier layer including polycarbosilane. [Selection] Figure 1 |