http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008546188-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-0738 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-0622 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-268 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-336 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-786 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-20 |
| filingDate | 2006-05-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2008-12-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2008546188-A |
| titleOfInvention | System and method for realizing interaction between a laser shaped as a line beam and a film deposited on a substrate |
| abstract | A molding line that positions a film against interaction with a laser shaped as a line beam and crystallizes the film, for example, to melt an amorphous silicon film to produce a thin film transistor (TFT), for example. Systems and methods for controlling beam parameters are provided. A laser crystallization apparatus and method for selectively melting a film, such as amorphous silicon, deposited on a substrate. The apparatus can include an optical system for generating stretched laser pulses that are used in melting the film. In yet another aspect of embodiments of the present invention, systems and methods for stretching laser pulses are provided. In another aspect, a system is provided for maintaining the divergence of a pulsed laser beam (stretched or unstretched) at a location along the beam path within a predetermined range. In another aspect, a system can be provided for maintaining the energy density in a predetermined range in the membrane during the interaction of the membrane with the shaped line beam. [Selection] Figure 6 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2018047220-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2018047220-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020501110-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020179056-A1 |
| priorityDate | 2005-05-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 26.