http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008519297-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0046 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2041 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03C1-76 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-091 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0752 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G77-22 |
| filingDate | 2005-11-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2008-06-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2008519297-A |
| titleOfInvention | Silicon-containing top antireflection coating material / barrier layer and method for forming the layer |
| abstract | PROBLEM TO BE SOLVED: To provide a top antireflection coating material / barrier layer insoluble in water and soluble in an aqueous base developer. A top antireflective coating material (TARC) and a barrier layer and their use in a lithographic process are disclosed. TARC / barrier layers are particularly useful for immersion lithography using water as the imaging medium. The TARC / barrier layer comprises a polymer with at least one silicon-containing portion and at least one portion that is soluble in an aqueous base solution. Suitable polymers have the structure Including a polymer having a silsesquioxane (ladder-like or network-like) structure, such as a polymer containing a monomer having R 1, wherein R 1 contains a moiety that is soluble in an aqueous base solution, and x is 1 to 1.95. And more preferably from 1 to 1.75. [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8835093-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8828879-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8815494-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9217921-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9023588-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11392037-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8864894-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2011033965-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013167669-A |
| priorityDate | 2004-11-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 88.